Summary of Oil-free Dry Mechanical Vacuum Pump
Summary of Oil-free Dry Mechanical Vacuum Pump
Oil-free dry mechanical vacuum pumps (hereinafter referred to as dry mechanical pumps) refer to mechanical vacuum pumps that can start pumping from atmospheric pressure and directly discharge the pumped gas into the atmosphere. There is no oil or other working medium in the pump chamber, and the limit pressure of the pump is the same or close to that of oil-sealed mechanical vacuum pumps.
At present, most mechanical vacuum pumps used in vacuum industry use oil, water or other polymers as working media of pumps, which play many roles such as cooling, sealing, lubrication and so on. With the development of science and technology and the expansion of vacuum application field, an overview of the original mechanical vacuum pump and its composition of oil-free dry mechanical vacuum pump
There are two urgent problems to be solved in the gas system. One is that the working medium of the pump pollutes the pumped container, which in many cases affects the quality and quantity of the product and increases the maintenance cost of the equipment. Secondly, the medium in the vacuum pump is seriously deteriorated due to some reactants in the process, which makes the pump unable to work properly.
For ordinary oil-free vacuum systems, although oil-sealed vacuum pumps and accessories such as cold traps or adsorption traps can be used to prevent reflux, they can not solve the problem thoroughly, and make the system complex. The use of a suitable type of dry mechanical vacuum pump can achieve the desired effect.
Dry mechanical vacuum pumps are widely used, mainly in the following aspects:
1) Polycrystalline silicon in low pressure chemical vapor deposition.
2) Semiconductor etching process. Corrosive gases and abrasive particles are often used or generated in these processes.
3) Except for the semiconductor process, some processes which produce particulates do not want particulates to be mixed into the pump oil, but want particulates to be discharged from the pump. A certain type of dry mechanical vacuum pump can meet the requirements.
4) Distillation, drying, defoaming and packaging in chemical industry, pharmaceutical industry and food industry should prevent pollution caused by organic solvents and be suitable for dry vacuum pumps.
5) Used as the front pump of general oil-free clean vacuum system to prevent oil pollution.
